All generators share a common, modular architecture and

accurate power measurement, feedback and control for

increased process control and reproduceability. All models

have feedback-controlled power regulation of 0.1% of

output power (line and load) and ripple of <±1% of output

unit) improves accuracy of power control to <±1.5% of

maximum power for increasing process consistency and

magnetrons to be replaced in the field, substantially

reducing cost of ownership.

monitors the generator’s operating system and provides

power shutdown protection and intelligent diagnostics. The

front panel give the user all the information needed to

understand system status, reduce MTTR and ensure

maximum uptime.

Power Accuracy —

operation. Forward power within ±1.5% of maximum power. Tests performed

using AX7610 applicator. Reflected power minimized with SmartMatch to

less than 1% in less than 2 sec.

AC

DC

µW

µW

Radicals

Power Control Feedback

Precision

Power

Detector

SmartMatch

Plasma

Source

Magnetron

Head

SmartPower

Isolator

Microwave Plasma Subsystem